Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
REDUCING METHOD OF CURRENT OF HEATER TERMINAL FOR SEMICONDUCTOR THERMAL TREATMENT EQUIPMENT
Document Type and Number:
Japanese Patent JPH07193019
Kind Code:
A
Abstract:

PURPOSE: To prevent the overheat of a terminal section by connecting each two-winding output of the first phase of a transformer and each two-winding output of a third phase in the same polarity and the output circuit of a second phase in reverse polarity.

CONSTITUTION: Currents fed from the second secondary winding of the R phase of a transformer are represented by I2. Currents supplied from the secondary winding of an S phase are represented by I3. Consequently, the values of currents I2 and currents I3 are equalized, and the currents I2 and I3 have phase difference at 180°. As a result, the vectorial sum I23 of the current values of both currents flowing through a terminal is equalized to the currents I2, and the currents I3. Likewise, a current value flowing through a terminal 3d is also equalized to current values supplied from each secondary winding of the transformer. Accordingly, currents are reduced, and there is no possibility that a specified terminal is burnt.


More Like This:
Inventors:
HAYASHI MICHIHIRO
WAKASHIRO AKIYOSHI
Application Number:
JP34697093A
Publication Date:
July 28, 1995
Filing Date:
December 27, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHINKO ELECTRIC CO LTD
International Classes:
H05B3/00; H01L21/22; H01L21/324; (IPC1-7): H01L21/22; H01L21/22; H01L21/324; H05B3/00
Attorney, Agent or Firm:
Haruya Saito (2 outside)