Title:
REENTRANT GAS SYSTEM FOR CHARGED PARTICLE MICROSCOPE
Document Type and Number:
Japanese Patent JP2023008925
Kind Code:
A
Abstract:
To provide gas delivery techniques for charged particle microscopes, and specifically, reentrant gas delivery systems that deliver a gas from a low voltage potential to a high potential that allow flexible design while minimizing or eliminating gas breakdown due to high electric fields.SOLUTION: A system comprises: a focused ion beam column 106 coupled to receive a gas and generate an ion beam with or from the gas; and a fluid delivery conduit 130 extending at least between first and second electrical potentials. The fluid delivery conduit 130 is formed into a tilted helical shape, so that a fluid flowing through the fluid delivery conduit 130 experiences an electric field reversal through each winding of the fluid delivery conduit 130.SELECTED DRAWING: Figure 1
Inventors:
JAMES B MCGINN
Application Number:
JP2022104647A
Publication Date:
January 19, 2023
Filing Date:
June 29, 2022
Export Citation:
Assignee:
FEI CO
International Classes:
H01J27/08; H01J37/317
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Osamu Miyazaki
Tadahiko Ito
Osamu Miyazaki