Title:
RESET RELEASING UNIT
Document Type and Number:
Japanese Patent JPH0951631
Kind Code:
A
Abstract:
To enhance the safety by invalidating the emergency reset when a solenoid valve drive switch is not closed.
A current detection circuit 14 detects the state where all solenoid drive switches Q1-Q3 are closed under emergency reset through a current limit resistor 13. When all solenoid drive switches Q1-Q3 are not closed, an emergency reset limit circuit 20 is closed thus invalidating an emergency reset signal 19.
Inventors:
KURIYAMA HIROSHI
Application Number:
JP20331495A
Publication Date:
February 18, 1997
Filing Date:
August 09, 1995
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
C23C16/44; H01L21/205; H02H11/00; (IPC1-7): H02H11/00; H01L21/205
Attorney, Agent or Firm:
Takehiko Suzue
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