Title:
樹脂組成物、樹脂シート、多層プリント配線板、及び半導体装置
Document Type and Number:
Japanese Patent JP7305110
Kind Code:
B2
Abstract:
An object of the present invention is to provide a resin composition and a resin sheet which have excellent photocurability for an active energy ray including an i-line with a wavelength of 365 nm in an exposure step, and can confer excellent alkaline developability in a development step, in the fabrication of a multilayer printed wiring board; and a high density printed wiring board and semiconductor device having a highly detailed resist pattern using the same. The resin composition of the present invention contains: a maleimide compound (A) containing a constituent unit represented by the following formula (1), and maleimide groups at both ends of the molecular chain; and a photo initiator (B) having an absorbance of 2.0 or more at a wavelength of 365 nm (i-line):
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Inventors:
Shunsuke Katagiri
Yune Kumazawa
Takuya Suzuki
Yune Kumazawa
Takuya Suzuki
Application Number:
JP2023508516A
Publication Date:
July 10, 2023
Filing Date:
June 14, 2022
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
C08F22/40; B32B27/26; C08F2/50; H01L23/29; H01L23/31; H05K3/46
Domestic Patent References:
| JP2010526846A | ||||
| JP2004534797A | ||||
| JP200636750A | ||||
| JP201032985A |
Foreign References:
| WO2020262579A1 | ||||
| WO2020262580A1 | ||||
| WO2020262588A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Kazuhiko Naito
Toshifumi Onuki
Kazuhiko Naito