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Title:
レジスト用（共）重合体およびレジスト組成物
Document Type and Number:
Japanese Patent JP5631670
Kind Code:
B2
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Inventors:
百瀬 陽
若林 茂夫
Application Number:
JP2010197892A
Publication Date:
November 26, 2014
Filing Date:
September 03, 2010
Export Citation:
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Assignee:
三菱レイヨン株式会社
International Classes:
C08F220/28; C08F2/38; C08F4/04; C08F4/32; C08F220/18; G03F7/039; H01L21/027



 
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