Title:
RESIST COATING APPARATUS
Document Type and Number:
Japanese Patent JPH11169775
Kind Code:
A
Abstract:
To enhance the rate of operation of a resist coating apparatus having a plurality of resist supply systems.
Three three-way valves 101, 102, 103 are arranged in the pipings 24 in the vicinity of the respective resist supply units 4 of first, second and third resist supply systems 1, 2, 3 being three resist supply systems supplying photoresists of different kinds and the pipings 115a, 115b, 115c of a thinner supply system 100 are connected to the three-way valves 101, 102, 103.
Inventors:
FUKUSHIMA MITSUHIRO
Application Number:
JP34022197A
Publication Date:
June 29, 1999
Filing Date:
December 10, 1997
Export Citation:
Assignee:
SONY CORP
International Classes:
G03F7/16; B05C11/10; B08B3/08; H01L21/027; (IPC1-7): B05C11/10; B08B3/08; G03F7/16; H01L21/027