Title:
レジスト組成物及びこれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP4034896
Kind Code:
B2
Inventors:
Motoshige Sumino
Akiko Katsuyama
Akiko Katsuyama
Application Number:
JP34660198A
Publication Date:
January 16, 2008
Filing Date:
November 19, 1998
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G03F7/039; C08F20/16; C08F32/00; H01L21/027
Domestic Patent References:
| JP2000508080A | ||||
| JP11002903A | ||||
| JP10207070A | ||||
| JP10130340A | ||||
| JP5297591A |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura