Title:
レジスト組成物、レジストパターン形成方法、新規な化合物及び酸発生剤
Document Type and Number:
Japanese Patent JP5798792
Kind Code:
B2
Inventors:
Takehiro Seshita
Yoshiyuki Utsumi
Kazushige Dotani
Yoshiyuki Utsumi
Kazushige Dotani
Application Number:
JP2011108667A
Publication Date:
October 21, 2015
Filing Date:
May 13, 2011
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; C07C25/18; C07C381/12; C09K3/00; G03F7/039
Domestic Patent References:
| JP2008074843A | ||||
| JP2011126872A | ||||
| JP2012072108A | ||||
| JP2011126871A | ||||
| JP2011046694A | ||||
| JP2012005907A | ||||
| JP2011090284A |
Foreign References:
| WO2011115138A1 | ||||
| US20080182203 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi