Title:
レジスト組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JP5816507
Kind Code:
B2
Inventors:
Daishi Shiono
Junichi Tsuchiya
Junichi Tsuchiya
Application Number:
JP2011214704A
Publication Date:
November 18, 2015
Filing Date:
September 29, 2011
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/039; C07C381/12; C08F220/58; G03F7/004
Domestic Patent References:
| JP2012117051A | ||||
| JP2011053360A | ||||
| JP2005208365A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi