Title:
レジスト組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JP5851282
Kind Code:
B2
Inventors:
Naoto Motoike
Application Number:
JP2012044693A
Publication Date:
February 03, 2016
Filing Date:
February 29, 2012
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; C07D303/14; C07D305/06; C07D307/00; C07D307/12; C07D307/20; C07D307/93; C07D309/06; C07D313/06; C07D327/02; C07D493/18; C08F20/38; G03F7/039
Domestic Patent References:
| JP2012252316A | ||||
| JP2011246439A | ||||
| JP2012006911A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi