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Patent Searching and Data


Title:
RESIST COMPOSITION AND VINYLIC POLYMER TO BE USED THEREFOR
Document Type and Number:
Japanese Patent JP2001247783
Kind Code:
A
Abstract:

To provide a radial ray-sensitive resist composition that has a high resolution and a high sensitivity and gives resist patterns having excellent pattern shapes and high etching resistance and a polymer to be used therefor.

The objective resist composition comprises (A) a polymer that has a structural unit including a group represented by general formula [1] (wherein individual symbols are defined in the patent specification) and (B) an acid-generating agent and the vinylic polymer to be used in the resist composition has a structural unit represented by general formula [2] (individual symbols are defined in the patent specification).


Inventors:
ABE NOBUNORI
TAWARA SHINICHIRO
Application Number:
JP2000063122A
Publication Date:
September 11, 2001
Filing Date:
March 08, 2000
Export Citation:
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Assignee:
NIPPON ZEON CO
International Classes:
G03F7/039; C08F8/00; C08F12/22; C08F20/18; C08F20/30; C08K5/00; C08L101/06; H01L21/027; (IPC1-7): C08L101/06; C08F8/00; C08F12/22; C08F20/18; C08F20/30; C08K5/00; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Uchiyama Mitsuru