Title:
レジスト組成物
Document Type and Number:
Japanese Patent JP6554971
Kind Code:
B2
Inventors:
Yuichi Mukai
Kae Araki
Koji Ichikawa
Kae Araki
Koji Ichikawa
Application Number:
JP2015148355A
Publication Date:
August 07, 2019
Filing Date:
July 28, 2015
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/038; G03F7/004; G03F7/039
Domestic Patent References:
| JP2009086358A | ||||
| JP2011148982A |
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto