Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
RESIST COMPOSITION
Document Type and Number:
Japanese Patent JPH07152154
Kind Code:
A
Abstract:

PURPOSE: To obtain a resist compsn. excellent in such various properties is color density, spectral characteristics, resolution and heat resistance.

CONSTITUTION: This resist compsn. contains an alkali-soluble resin, a solvent and a dye represented by the general formula (where each of A and B is H, alkyl or aryl, R is alkyl, cycloalkyl, alkoxy, alkoxyalkyl, aryl, etc., M is H, etc., 0≤m≤2 and 1≤n≤3).


Inventors:
HISHIRO YOSHIKI
Application Number:
JP30000193A
Publication Date:
June 16, 1995
Filing Date:
November 30, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
G03F7/004; C09B1/26; C09B1/32; G02B5/20; G03F7/022; G03F7/029; G03F7/038; G03F7/039; (IPC1-7): G03F7/039; C09B1/26; C09B1/32; G02B5/20; G03F7/004; G03F7/022; G03F7/029; G03F7/038
Attorney, Agent or Firm:
Takashi Kuboyama (1 person outside)