Title:
RESIST FILM COATING DEVICE
Document Type and Number:
Japanese Patent JP2833917
Kind Code:
B2
Abstract:
PURPOSE: To prevent lowering of adhesion strength of a resist film by monitoring the vapor concentration in a chamber where solvent vapor deposition is made prior to resist film coating.
CONSTITUTION: After taking out part of gas in a chamber 3 through tubes 5b, 5c, the part of gas is led in a gas detector 7, thereby the concentration of solvent vapor in the chamber 3 is measured, and an alarm is raised at the time when the concentration of the solvent vapor is abnormal.
Inventors:
YANABE YUKIHIRO
Application Number:
JP7973192A
Publication Date:
December 09, 1998
Filing Date:
April 01, 1992
Export Citation:
Assignee:
KYUSHU NIPPON DENKI KK
International Classes:
B05C11/08; G03F7/16; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/16
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)