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Title:
レジスト材料及びこれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5798100
Kind Code:
B2
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Inventors:
Jun Hatakeyama
Application Number:
JP2012229266A
Publication Date:
October 21, 2015
Filing Date:
October 16, 2012
Export Citation:
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Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/039; C08F32/08; G03F7/004
Domestic Patent References:
JP2012063728A
JP2003096007A
JP2004107377A
JP2008248063A
Attorney, Agent or Firm:
Mikio Yoshimiya



 
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