Title:
レジスト除去装置
Document Type and Number:
Japanese Patent JP4323252
Kind Code:
B2
Inventors:
Suganaga Daisuke
Osamu Fujine
Shigeru Mizukawa
Nakata Victory
Osamu Fujine
Shigeru Mizukawa
Nakata Victory
Application Number:
JP2003285719A
Publication Date:
September 02, 2009
Filing Date:
August 04, 2003
Export Citation:
Assignee:
Sumitomo Precision Products Co., Ltd.
International Classes:
H01L21/027; G03F7/30; H01L21/00; H01L21/304; G03F7/42
Domestic Patent References:
| JP11307434A | ||||
| JP4342134A | ||||
| JP2002359452A | ||||
| JP2001200379A | ||||
| JP2004174463A | ||||
| JP2003322976A | ||||
| JP2004152987A |
Foreign References:
| WO2002049087A1 |
Attorney, Agent or Firm:
Takahiko Yanagita