Title:
レジスト剥離剤組成物
Document Type and Number:
Japanese Patent JP4867092
Kind Code:
B2
Inventors:
Ikemoto alone
Maruyama Taketo
Hiroshi Yoshida
Maruyama Taketo
Hiroshi Yoshida
Application Number:
JP2001203755A
Publication Date:
February 01, 2012
Filing Date:
July 04, 2001
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
G03F7/42; H01L21/027
Domestic Patent References:
| JP9269601A | ||||
| JP10171130A | ||||
| JP2001350276A | ||||
| JP7219241A | ||||
| JP2002072505A | ||||
| JP2005502734A | ||||
| JP2001249465A |
Foreign References:
| WO2001096964A1 |
Attorney, Agent or Firm:
Takashi Nagai