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Title:
RESONANCE ELEMENT AND ITS VIBRATION ADJUSTING METHOD
Document Type and Number:
Japanese Patent JP2001174264
Kind Code:
A
Abstract:

To simply adjust the vibration of a vibrator in a resonance element.

In the resosnance element 1, a detecting electrode 40 which is arranged so as to face the resonator 5 in the Z-direction via an interval is installed. A conductive layer 20 and a conductive layer 21 which are used to correct the inclination of the vibrator 5 with reference to the substrate face of a fixation substrate 2 are installed. The detecting electrode 40 detects a capacitance across the detecting electrode 40 and the vibrator 5. A capacitance- to-voltage conversion means 43 converts the detected capacitance into a voltage so as to be output from an output part P. When the vibrator 5 is deflected in the Z-direction although an angular velocity around the Y-axis is not generated during the excitation in the X-direction of the vibrator 5, the voltage of the output part P is changed according to the deflection in the Z-direction. When a voltage applied across the conductive layers 20, 21 is variably controlled in a direction in which the deflection of the voltage of the output part P is converged, the vibration of the vibrator 5 is adjusted.


Inventors:
KAWAI HIROSHI
Application Number:
JP36288699A
Publication Date:
June 29, 2001
Filing Date:
December 21, 1999
Export Citation:
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Assignee:
MURATA MANUFACTURING CO
International Classes:
H01L41/09; G01C19/56; G01C19/5719; G01C19/5726; G01C19/5755; G01C19/5769; G01P15/097; G01P15/10; G01P15/125; G01P21/00; (IPC1-7): G01C19/56; G01P9/04; G01P21/00; H01L41/09
Attorney, Agent or Firm:
Kiyoshi Igarashi