To simply adjust the vibration of a vibrator in a resonance element.
In the resosnance element 1, a detecting electrode 40 which is arranged so as to face the resonator 5 in the Z-direction via an interval is installed. A conductive layer 20 and a conductive layer 21 which are used to correct the inclination of the vibrator 5 with reference to the substrate face of a fixation substrate 2 are installed. The detecting electrode 40 detects a capacitance across the detecting electrode 40 and the vibrator 5. A capacitance- to-voltage conversion means 43 converts the detected capacitance into a voltage so as to be output from an output part P. When the vibrator 5 is deflected in the Z-direction although an angular velocity around the Y-axis is not generated during the excitation in the X-direction of the vibrator 5, the voltage of the output part P is changed according to the deflection in the Z-direction. When a voltage applied across the conductive layers 20, 21 is variably controlled in a direction in which the deflection of the voltage of the output part P is converged, the vibration of the vibrator 5 is adjusted.