Title:
RETAINER, ILLUMINATION OPTICAL SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING ARTICLES
Document Type and Number:
Japanese Patent JP2020012987
Kind Code:
A
Abstract:
To provide a retainer advantageous for retaining an optical member at a high accuracy level.SOLUTION: The present invention relates to a retainer for retaining an optical member 2 so that the optical axis of the optical member 2 extends along a direction which intersects with a vertical direction; a spring member 1 holding the optical member 2; and an additive member 4 for pressurizing the spring member 1 in the vertical direction. The spring member 1 has a first part 1a pressing a first surface 2a of the optical member, a second part 1b pressing a second surface 2b of the optical member, and a third part 1c between the first part 1a and the second part 1b, the third part being in contact with the additive member 4 and being pressurized by the additive member 4, and the first part 1a and the second part 1b and the third part 1c being continuous to each other.SELECTED DRAWING: Figure 2
Inventors:
OBA MORIAKI
SASAKI YASUHITO
SASAKI YASUHITO
Application Number:
JP2018135222A
Publication Date:
January 23, 2020
Filing Date:
July 18, 2018
Export Citation:
Assignee:
CANON KK
International Classes:
G02B7/02; G02B7/00; G03F7/20
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu