Title:
リソグラフ装置
Document Type and Number:
Japanese Patent JP4216820
Kind Code:
B2
Abstract:
The present invention provides an apparatus and method for determining displacement along the z-direction of an object, which is fixed in a holder of an apparatus and is illuminated by a beam of radiation, the beam being provided by the apparatus and having an optical axis extending in the z-direction. The method comprises arranging the measuring mirror(s) and/or measuring laser beam of an interferometer system such that no relevant part of the laser beam is parallel to the z-direction. This ensures that the interferometer system and its parts may be arranged away from the beam of radiation, allowing larger diameter projection systems for the beam of radiation, as well as more homogeneous air showers around the object. Thus the quality of the illumination of the object may be improved.
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Inventors:
Edwin Eduard Nicolas Josephs Kleinen
Application Number:
JP2005040269A
Publication Date:
January 28, 2009
Filing Date:
February 17, 2005
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G01B11/00; H01L21/027; G01B9/02; G03F7/20
Domestic Patent References:
| JP2000039305A |
Other References:
Peggs et. al.,Design for a Compact High-Accuracy CMM,CIRP Annals,米国,Vol 48/1,P417-420
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki
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