Title:
ROBOT ARM
Document Type and Number:
Japanese Patent JP2676334
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To dispense with an exclusive drive mechanism for supporting a processing subject by installing an auxiliary support member supported swingably to the support shaft on the support member.
SOLUTION: When a first arm 51A is put in turning movement clockwise as fixing a rotary shaft 52, an arm head 51C is moved in parallel in the direction keeping away from the rotary shaft 52. The arm head 51C is put in turning movement clockwise around the rotary shaft 54 relatively for a second arm 51B. A roller 154A is moved from a cam surface 157A toward 158A. An auxiliary support member 152A is swung clockwise by making a support shaft 153A to a fulcrum. An auxiliary support member 152B is swung counterclockwise by making the support shaft 153A to a fulcrum, alike. Projections 155A and 155B are hiden downward the support member 151 and the support of a wafer is released.
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Inventors:
Tadashi Tamai
Toshitaka Yamamoto
Toshitaka Yamamoto
Application Number:
JP19522895A
Publication Date:
November 12, 1997
Filing Date:
July 31, 1995
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B25J9/06; B25J9/10; B25J15/00; B25J15/08; H01L21/687; (IPC1-7): B25J9/06; B25J15/08
Domestic Patent References:
| JP549290U |
Attorney, Agent or Firm:
Keishiro Takahashi (2 outside)