Title:
Robot
Document Type and Number:
Japanese Patent JP5949837
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a sensor element array having sensitivity in a plurality of directions at a low cost.SOLUTION: A sensor element array comprises: a first sensor element; a second sensor element; and a sheet substrate where the first sensor element and the second sensor element are arranged. A slit is arranged in the sheet substrate, and a gap of the slit is enlarged. In the sheet substrate, a substrate surface at a position where the first sensor element is arranged, and a substrate surface at a position where the second sensor element is arranged, are formed at a crossing angle to each other.
Inventors:
Toshiyuki Kamiya
Application Number:
JP2014120275A
Publication Date:
July 13, 2016
Filing Date:
June 11, 2014
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01L5/00; G01L5/16
Domestic Patent References:
| JP2006208248A | ||||
| JP2005294300A | ||||
| JP2001331271A | ||||
| JP2001255221A | ||||
| JP9304006A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe