ROLL MADE OF VITRIFIED CARBON, ITS PRODUCTION, PLASMA GENERATOR, ITS CHAMBER INNER WALL PROTECTING MEMBER, PROTECTION OF THE CHAMBER INNER WALL AND PLASMA TREATMENT

Japanese Patent JPH11189471

A

To provide a large-sized dense and flexible roll made of vitrified carbon and a method for producing the roll and a chamber inner wall protecting member for a plasma generator capable of preventing reduction in yield caused by metal contamination of semiconductor wafer and a discharged foreign matter and readily removing a deposit film of the plasma generator.

This method for producing a roll made of vitrified carbon comprises molding a thermosetting resin into a roll shape and subjecting it to carbonizing and baking. The roll made of vitrified carbon has such a flexibility as to shrink its outer diameter in a state of no applied external force into an outer diameter corresponding to ≤97% the outer diameter. The chamber inner wall protecting material for a plasma generator composed of the roll made of vitrified carbon obtained by the production method has ≤100 μm maximum pore diameter.

HYAKKI YASUO
SUZUKI TAKAYUKI
KAMATA MITSUJI
HIRONAKA SHINTARO
WATANABE YOSHIMITSU

JP35642197A

July 13, 1999

December 25, 1997

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HITACHI CHEMICAL CO LTD

H05H1/46; B29C51/00; C01B31/02; C04B35/52; C04B38/00; C23F4/00; H01L21/302; H01L21/3065; H01L21/31; B29L31/32; (IPC1-7): C04B35/52; B29C51/00; C01B31/02; C04B38/00; C23F4/00; H01L21/31; H05H1/46

Kunihiko Wakabayashi

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