Title:
ローラ機構及びエッチング装置
Document Type and Number:
Japanese Patent JP6684835
Kind Code:
B2
Abstract:
To provide a support for a roller mechanism capable of setting bearing positions of two rollers independently, a roller mechanism using the support, and an etching apparatus using the roller mechanism.SOLUTION: A support 11 for a roller mechanism comprises a lower step groove 11aformed in a shape including a first semicircle 11aand a first rectangle 11a, and an upper step groove 11aformed in a shape including a second semicircle 11aand a second rectangle 11a. A roller mechanism 10 capable of setting the bearing positions of two rollers independently can be configured by that a lower roller 12 and an upper roller 13 are inserted from an opening of the groove, the lower roller 12 is passed through the upper step groove to be supported with the lower step groove, and the upper roller 13 is supported with the upper step groove. An etching apparatus 1 can be configured using the roller mechanism 10.SELECTED DRAWING: Figure 1
Inventors:
Hideki Sato
Application Number:
JP2018007634A
Publication Date:
April 22, 2020
Filing Date:
January 19, 2018
Export Citation:
Assignee:
Fuji Kiko Co., Ltd.
International Classes:
B65G13/00; H01L21/306; H01L21/677
Domestic Patent References:
| JP9129702A | ||||
| JP2014218324A | ||||
| JP2008126220A |
Attorney, Agent or Firm:
Hiroshi Kaneko