Title:
ROLLING MEMBER, VACUUM APPARATUS USING ROLLING MEMBER, AND METHOD FOR MANUFACTURING ROLLING MEMBER
Document Type and Number:
Japanese Patent JP2011052257
Kind Code:
A
Abstract:
To provide a rolling member having a long lubrication life, and to provide a vacuum apparatus using the rolling member and a method for manufacturing the rolling member.
The rolling member 1 made of an iron-based alloy has a lubrication coating 100, which is formed on a rolling face of a rolling element 10 made of an iron-based alloy and which is formed of at least one of molybdenum disulfide and tungsten disulfide and contains iron, wherein the atomic concentration of iron is more than 0.02 and not more than 0.12 with respect to the atomic concentration of molybdenum or tungsten.
Inventors:
OGUMA KIYONORI
IKEDA MITSUAKI
MATSUDA KENJI
IKEDA MITSUAKI
MATSUDA KENJI
Application Number:
JP2009201238A
Publication Date:
March 17, 2011
Filing Date:
September 01, 2009
Export Citation:
Assignee:
YASKAWA ELECTRIC CORP
International Classes:
C23C30/00; C01G39/06; C01G41/00; C10M103/06; C10M125/04; C23C14/06; F16C33/66; C10N30/00; C10N30/06; C10N40/00; C10N40/02; C10N50/08