To provide a determination method of a Ronchigram center capable of determining the Ronchigram center for aberration correction and for axis adjustment, regarding a determination method of the Ronchigram center.

This method is structured, such that an imaging means is arranged on a final imaging surface of a scanning transmission electron microscope; a sample enabling its shape to be recognized is arranged, to form an optical system capable of observing a Ronchigram to take ample defocusing; a Ronchigram image 1 is photographed by the imaging means in this state; an acceleration voltage is changed; the change of an enlargement ratio is calculated from a defocus amount, changed by known chromatic aberrations; a Ronchigram image 2 is photographed by the imaging means in this state; predetermined image processing is carried out, by using the Ronchigram image 1 and the Ronchigram image 2; and a fixed point of the images is found, based on the image processing result.

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