Title:
ROTARY CARRIAGE
Document Type and Number:
Japanese Patent JP2002293427
Kind Code:
A
Abstract:
To provide a rotary carriage capable of improving production efficiency by rotating a rotating table (a work) by non-contact by making the rotary carriage optimum as a work holder of a deposition apparatus.
This rotary carriage is provided with a revolvable revolving table 10 and the rotating table 20 mounted rotatably on the revolving table 10. First magnets 31, 32 and 33 are mounted on the rotating table 20. By providing a second magnet 40 attracting the first magnets 31, 32 and 33 according to revolution of the revolving table 10, the rotating table 20 can be rotated by non-contact by attraction of the magnets 31, 32, 30 and 40.
Inventors:
HASHIMOTO YASUHISA
IKEGAYA AKIHIKO
FUKUI HARUYO
SETOYAMA MAKOTO
IKEGAYA AKIHIKO
FUKUI HARUYO
SETOYAMA MAKOTO
Application Number:
JP2001094519A
Publication Date:
October 09, 2002
Filing Date:
March 29, 2001
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
B65G47/80; C23C14/50; F16H31/00; F16H49/00; (IPC1-7): B65G47/80; C23C14/50; F16H31/00; F16H49/00
Attorney, Agent or Firm:
Hiroshi Yamano (1 person outside)