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Patent Searching and Data


Title:
ROTARY TREATING DEVICE
Document Type and Number:
Japanese Patent JPH06244165
Kind Code:
A
Abstract:

PURPOSE: To improve the chemical resistance of a rotary treating device and, at the same time, to increase the rotating speed of the device by bringing the resultant center of mass of a turntable, block, pin, and balancers to the surface of the turntable on which the centrifugal force of the turntable acts.

CONSTITUTION: Balancers 7 are respectively fitted to arm sections of a table 3 and the positions of the center of mass of the balancers 7 below the table 3 are balanced with the center of mass of a block and pin 5 above the table 3 so that the resultant center of mass 11b of the balancers 7, block 4, and pin 5 can be come to the central surface 10 of the table 3. when the block 4 and pin 5 are formed of polypropylene and balancers 7 are formed of polytetralfluoroethylene, the rotating section can be reduced in size and weight and, at the time, the chemical resistance of the rotating section can be improve. In addition, the rotating speed of the table 3 can be increased by reducing the thickness of the table 3 without increasing the rigidity of the table 3.


Inventors:
TAKIZAWA YOSHIHARU
HONMA YOSHIFUMI
SATO TOMOHIRO
Application Number:
JP2670993A
Publication Date:
September 02, 1994
Filing Date:
February 16, 1993
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
B08B11/02; H01L21/304; (IPC1-7): H01L21/304; B08B11/02
Attorney, Agent or Firm:
Akio Takahashi (1 person outside)