Title:
離散的偏光状態をとる回転可能な補償子型分光エリプソメーターシステム、及び較正方法
Document Type and Number:
Japanese Patent JP2009543092
Kind Code:
A
Inventors:
Joes, Brain Dee.
Hazinger, Craig M.
Green, Stephen E.
Hale, Jeffreys.
Hazinger, Craig M.
Green, Stephen E.
Hale, Jeffreys.
Application Number:
JP2009519418A
Publication Date:
December 03, 2009
Filing Date:
July 11, 2006
Export Citation:
Assignee:
J.A.WOOLLAM CO.,INC.
International Classes:
G01J4/04; G01J3/447; G01N21/21; G01N21/27
Domestic Patent References:
| JP2002543381A | 2002-12-17 | |||
| JP2000509830A | 2000-08-02 |
Attorney, Agent or Firm:
Takashi Ogaki
Hiroyuki Okada
Hiroyuki Okada