Title:
回転装置、ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP5290240
Kind Code:
B2
More Like This:
Inventors:
River Saki Hiroyuki
Matsutaro Miyamoto
Matsutaro Miyamoto
Application Number:
JP2010130565A
Publication Date:
September 18, 2013
Filing Date:
June 07, 2010
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H02K17/16; F04D19/04; H02K7/14
Domestic Patent References:
| JP2002286036A | ||||
| JP2053264U | ||||
| JP11027911A |
Attorney, Agent or Firm:
Takashi Kumagai
Ryohei Kaizuka
Masato Ota
Ryohei Kaizuka
Masato Ota
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