Title:
回転位置決めステージ
Document Type and Number:
Japanese Patent JP3133886
Kind Code:
U
Inventors:
Masayoshi Uji
Application Number:
JP2007003495U
Publication Date:
July 26, 2007
Filing Date:
May 15, 2007
Export Citation:
Assignee:
Machine Engineering Co., Ltd.
International Classes:
G12B5/00; B23Q16/02
Attorney, Agent or Firm:
Matsuji Takemoto
Hideo Sugiyama
Koichi Yuda
Uozumi Takahiro
Hideo Sugiyama
Koichi Yuda
Uozumi Takahiro