Title:
ROUGHNESS MEASURING METHOD BY REPLICA FILM
Document Type and Number:
Japanese Patent JPH04249701
Kind Code:
A
Abstract:
PURPOSE:To transfer a replica film peeled from the surface to be measured without generating wrinkles or deformation and to easily fix the replica film onto a measuring plate without wrinkles and deformation. CONSTITUTION:After the rough pattern on a surface 10 to be measured is transferred onto a replica film 12, the film is scraped off and put in a hard case 13, and transported to a measuring spot. The replica film 12 pulled out, from the hard case 13 is extended on a measuring plate 16 having a magnet provided therebelow. At this time, the transferred surface of the replica film 12 is turned upside. A magnetic body 18 is placed in the periphery of the upper surface of the replica film 12, which is attracted by the magnet. Accordingly, the replica film 12 is depressed and fixed. Then, the roughness of the transferred surface is measured by a probe-type roughness gauge 15.
Inventors:
FUJISAO YOSHIHIRO
UEHARA TAKASHI
FUJIWARA MINORU
KONO KAZUYOSHI
UEHARA TAKASHI
FUJIWARA MINORU
KONO KAZUYOSHI
Application Number:
JP999491A
Publication Date:
September 04, 1992
Filing Date:
January 04, 1991
Export Citation:
Assignee:
NIPPON STEEL CORP
International Classes:
G01B5/28; (IPC1-7): G01B5/28
Domestic Patent References:
| JPS60193342A | 1985-10-01 | |||
| JPS5668695A | 1981-06-09 |
Attorney, Agent or Firm:
Masamitsu Akizawa (1 person outside)