Title:
Ru-Al ALLOY TARGET AND METHOD FOR PREPARING THE SAME
Document Type and Number:
Japanese Patent JP2023063234
Kind Code:
A
Abstract:
To provide a Ru-Al alloy target comprising Ru, Al and oxides that has higher relative density and bending strength and also has improved oxidation resistance.SOLUTION: Relative to the total atomicity of a Ru-Al alloy target, the content of Al is 5 at% to 50 at% and the content of oxides is 5 at% to 40 at%, while the content of Cl in the Ru-Al alloy target is less than 50 ppm. In an XRD pattern in a longitudinal section of the Ru-Al alloy target, the ratio of the strength of a crystal face of (110) RuAl phase to the strength of a crystal face of (111) Al phase is more than 2.SELECTED DRAWING: None
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Inventors:
CHEN YOU-LING
WU TIEN-CHIEH
CHENG HUI-WEN
WU TIEN-CHIEH
CHENG HUI-WEN
Application Number:
JP2022146747A
Publication Date:
May 09, 2023
Filing Date:
September 15, 2022
Export Citation:
Assignee:
SOLAR APPLIED MATERIALS TECH CORP
International Classes:
C22C32/00; C22C1/05
Attorney, Agent or Firm:
Patent Attorney Corporation Hiroe Associates Patent Office
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