Title:
SALT, ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN
Document Type and Number:
Japanese Patent JP2023014038
Kind Code:
A
Abstract:
To provide a salt and an acid generator that can produce a resist pattern having excellent line edge roughness, and a resist composition comprising the same.SOLUTION: The present invention provides a salt represented by the formula (I), an acid generator and a resist composition.SELECTED DRAWING: None
Inventors:
SHIMADA MASAHIKO
ICHIKAWA KOJI
ICHIKAWA KOJI
Application Number:
JP2022112441A
Publication Date:
January 26, 2023
Filing Date:
July 13, 2022
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
G03F7/004; C07D409/12; C08F212/14; C08F220/18; G03F7/038; G03F7/039; G03F7/20
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation