Title:
Salt and a manufacturing method of an acid generator
Document Type and Number:
Japanese Patent JP5910713
Kind Code:
B2
Abstract:
A salt represented by the formula (I0): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, L1 represents a divalent C1-C17 hydrocarbon group in which one or more —CH2— can be replaced by —O— or —CO—, m represents 1 or 2, and Zm+ represents m-valent organic or inorganic cation.
Inventors:
Isao Yoshida
Koji Ichikawa
Koji Ichikawa
Application Number:
JP2014247782A
Publication Date:
April 27, 2016
Filing Date:
December 08, 2014
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07C381/12; C07D233/60; C09K3/00; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2012031145A | ||||
| JP2013028540A | ||||
| JP2008013551A | ||||
| JP2011116746A | ||||
| JP2007224008A | ||||
| JP2006257078A |
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto