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Title:
酸発生剤用の塩及びレジスト組成物
Document Type and Number:
Japanese Patent JP5609570
Kind Code:
B2
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Inventors:
市川 幸司
吉田 勲
杉原 昌子
Application Number:
JP2010252603A
Publication Date:
October 22, 2014
Filing Date:
November 11, 2010
Export Citation:
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Assignee:
住友化学株式会社
International Classes:
C07D307/00; C07D333/46; G03F7/004; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Nakayama 亨
Toru Sakamoto



 
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