Title:
酸発生剤用の塩及びレジスト組成物
Document Type and Number:
Japanese Patent JP5703701
Kind Code:
B2
Inventors:
Koji Ichikawa
Mitsuyoshi Ochiai
Masako Sugihara
Mitsuyoshi Ochiai
Masako Sugihara
Application Number:
JP2010252600A
Publication Date:
April 22, 2015
Filing Date:
November 11, 2010
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07C309/17; C07C25/18; C07C309/12; C07C381/12; C07D327/08; C07D333/46; C09K3/00; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2008074843A |
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto