PURPOSE: To analyze a target component in a liquid sample by atomizing the liquid sample over the surface of the surface of a heated sample holder and performing fluorescent X-ray spectroscopy about the surface of the sample holder where vaporized residue sticks.

CONSTITUTION: An atomizer 3 is arranged opposite the sample holder 1. The liquid sample 4 is supplied into the atomizer 3 through a sample suction tube 6 by supplying gas into the atomizer from a gas flow intake 5 and then atomized to the holder 1 from an injection opening 7. The sample atomized over the surface of the holder 1 is vaporized instantaneously by being heated by a heater 2 and a target component of spectroscopy is concentrated in the vaporized residue. Then fluorescent X-ray spectroscopy is performed about the surface of the holder 1 where the vaporized residue sticks to analyze the target component is the sample 4 with high sensitivity.