PURPOSE: To improve stability to vibration of a sample device and X and Y transfer accuracy, further to prevent deviation of a sample position due to tilt moving of the sample by concentrically arranging the X and Y driving axes in the centers of the in two divided inclined axes respectively.

CONSTITUTION: A stage 20 is tiltably supported to a sample chamber 22 by two tilting axes 21a and 21b, which are orthogonal to an optical axis 0 and dividedly arranged so as to be opposing while putting the optical axis between. Further, a sample holder 31 holding a sample 30 so that the sample surface may be positioned in the center of the tilting axes is mounted to be free mounted and dismounted on aforesaid X-directionally moving stand. A feed screw Y for Y-driving is connected to a driving axis 33 Y and a feed screw 26 X for X-driving is connected to a driving axis 33 X. The driving axes 33 X, 33Y are cocentrically arranged in the centers of the tilting shafts 21a, 21b respectively so that no tortion is generated to the respective driving shafts and no deviation of a sample position is generated even the stage 20 is tilted.