Title:
SAMPLE INSPECTION METHOD AND INSPECTION APPARATUS
Document Type and Number:
Japanese Patent JP3944075
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce the overlook of a common defect in a die comparison system and a post-process due to double counting of the defect existing in a reference image after inspection and realize an efficient inspection.
SOLUTION: In a sample inspection method using die comparison and database comparison at the same time, a comparison part 25 compares a first optical image obtained by optically imaging a first die with the reference image obtained from a design data corresponding to the die per pixel in a two-dimensional pattern mask having a plurality of repetitive regions, a multiplexer 27 combines the first optical image and the reference image for every pixel, a standard image is created and registered with an image memory 22, the comparison part 25 compares a second optical image obtained by imaging a second die with the standard image for every pixel and the defect is determined in response to a compared result of the comparison part 25.
Inventors:
Kyoji Yamashita
Kazuhiro Nakajima
Kazuhiro Nakajima
Application Number:
JP2002382263A
Publication Date:
July 11, 2007
Filing Date:
December 27, 2002
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01B11/30; G01N21/956; G03F1/84; (IPC1-7): G01N21/956; G01B11/30; G03F1/08
Domestic Patent References:
| JP57130423A | ||||
| JP2001307070A | ||||
| JP8189898A | ||||
| JP4197753A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai