Title:
SAMPLE PREPARATION APPARATUS AND SAMPLE PREPARATION METHOD
Document Type and Number:
Japanese Patent JP2016081878
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a sample preparation apparatus or the like, in which an irradiation range of an ion beam in an observation image can be easily understood.SOLUTION: A sample preparation apparatus includes: an imaging unit imaging a sample to output an observation image OIof the sample; an ion beam generating unit generating an ion beam to be irradiated on the sample; and an image processing unit synthesizing a marker MK, which indicates an irradiation range of the ion beam relative to the observation image OI, to generate a synthetic image SIand outputting a generated synthetic image SIto a display unit.SELECTED DRAWING: Figure 1
Inventors:
SEKIDO TAKUYA
Application Number:
JP2014215560A
Publication Date:
May 16, 2016
Filing Date:
October 22, 2014
Export Citation:
Assignee:
JEOL LTD
International Classes:
H01J37/305; G01N1/28; H01J37/22; H01J37/30
Domestic Patent References:
| JPH01304648A | 1989-12-08 | |||
| JPH04149945A | 1992-05-22 | |||
| JPH05198282A | 1993-08-06 | |||
| JP2001340350A | 2001-12-11 | |||
| JP2004158392A | 2004-06-03 | |||
| JP2006177896A | 2006-07-06 |
Foreign References:
| US20120211652A1 | 2012-08-23 |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi
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