電子顕微鏡における試料観察方法、電子顕微鏡用画像解析装置、電子顕微鏡および電子顕微鏡用画像解析方法

Japanese Patent JP7040496

B2

To provide a sample observation method in electron microscope, an image analyzer for electron microscope, an electron microscope and an image analysis method for electron microscope, capable of analyzing an image by using secondary electron intensity and reflection electron intensity acquired by elementary analysis, without mounting a new electron detector or without changing the detector position, and obtaining an image reflecting microstructure of tissue.SOLUTION: A sample observation method in electron microscope having a reflection detector and a secondary electron detector scans an arbitrary region of sample surface by a primary electron beam, acquires a reflection electron image of M×N pixels of the region, acquires a secondary electron image of M×N pixels of the region, performs multivariate statistical analysis for an aggregation of two-dimensional vector of M×N having the contrast of reflection electron image of the same pixel and the contrast of the secondary electron image, as components, in the reflection electron image and the secondary electron image, finds the factor load amount of the first chief ingredient and the factor load amount of the second chief ingredient, and displays the factor load amount of the first chief ingredient and the factor load amount of the second chief ingredient as the image of M×N pixels.SELECTED DRAWING: Figure 4

Yuji Tanaka
Takako Yamashita

JP2019099372A

March 23, 2022

May 28, 2019

Click for automatic bibliography generation  

jfe Steel Corporation

G01N23/2209; H01J37/22; G01N23/2251; G01N23/2252; H01J37/244; H01J37/28

JP2016139467A
JP2009192519A
JP2299145A
JP2018152330A

WO2017002226A1
US20180019097
US20180197726
US20170169558

Tetsuro Isomura
Akira Kumasaka
Tetsuya Sakai
Kazuhiro Mori

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