PURPOSE: To analyze a powdery sample with high accuracy for the inside distribution of impurities from the surface of each particle of the sample by burying and fixing the sample in and to a metal for preventing the accumulation of electric charged in the vicinity of the sample when the powder particles are analyzes in the depth direction with an Auger electron spectrometer, etc.
CONSTITUTION: After a low-melting point alloy 32 of a bismuth alloy is put in a board 33 and melted, powder particles 1 to be analyzed are diffused to the surface of the molten alloy 32 and a clean and smooth glass plate 34 is pressed against the surface of the alloy 32 before the alloy 32 solidifies so that the particles 1 can get into the alloy 32, with the glass plate 34 being pressed against the alloy 32 until the alloy 32 solidifies. Then the alloy 32 is taken out from the board 33 and ground from the surface until the particles 1 in the alloy 32 are ground to semispheric forms by inspecting the ground surface with an optical microscope, scanning secondary electron microscope, etc. Then the ground surfaces of the particles 1 are measured for the inward distribution of components from the outer periphery by using an Auger electron spectrometer 4 after removing the contaminant stuck to the ground surface of the particles at the time of grinding and improving the cleanness of the ground surface by irradiating the surface with an iron beam 36 in a vacuum vessel 37.
OKAMOTO HAMAO
HATTORI SEIJI
NTT TECHNOLOGY TRANSFER