Title:
SCANNING ELECTRON MICROSCOPE AND BRIGHTNESS ADJUSTMENT METHOD
Document Type and Number:
Japanese Patent JP2023068788
Kind Code:
A
Abstract:
To enable objective and reproducible adjustment of a brightness distribution of an electronic image.SOLUTION: A histogram 78 of a standard sample is produced based on an electronic image. An offset of a detection signal is automatically adjusted such that a mid point Cx between an apex point P1a of a first peak and an apex point P2a of a second peak matches a standard mid point C0. Gain of the detection signal is then adjusted such that a distance Dx between an apex point P1b and an apex point P2b matches a standard distance D0.SELECTED DRAWING: Figure 7
Inventors:
WATAKABE KAZUTAKA
Application Number:
JP2021180110A
Publication Date:
May 18, 2023
Filing Date:
November 04, 2021
Export Citation:
Assignee:
JEOL LTD
International Classes:
G01N23/2251; G01N23/2204; H01J37/20; H01J37/22; H01J37/28
Attorney, Agent or Firm:
Patent Attorney Corporation YKI International Patent Office