PURPOSE: To observe a sample image in stereoscopic vision with high resolution by using one radiation of two-way electron beams as an electron beam for high resolution observation, using the other as an electron beam for stereoscopic observation, and switching both beams dynamically to/from each other.
CONSTITUTION: A deflection signal generator 11 is connected to an angle controller 13 to control a sample radiating angle of an electron beam 2, and the beam 2 is switched to a vertically radiating ordinary electron beam 21 and an obliquely radiating electron beam 22 to a sample 7 by a signal of the controller 13. The beam 22 does not dislocate from a sample 7 radiating position because of a deflector 6 or an axis outside deflecting action of an objective lens 5. A signal of the controller 13 is sent simultaneously to glasses 14 to observe a CRT12, and an image of a scanning type electron microscope SEM of the beams 21 and 22 can be observed correspondingly by left and right eyes. Thereby, the SEM image can be observed in stereoscopic vision with high resolution.
| JPH05144404 | ELECTRON BEAM FIGURE DRAWING DEVICE |
| JPH01274347 | ION BEAM DEVICE |
| JP5808041 | Phase plate and transmission electron microscope |
NINOMIYA TAKESHI
KURE TOKUO
TODOKORO HIDEO
TERAKADO SADAO
YAMADA SATORU
MIZUNO FUMIO
Next Patent: MANUFACTURE OF COMPOSITE BRAZING MEMBER