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Title:
SCANNING ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JPH08212961
Kind Code:
A
Abstract:

PURPOSE: To efficiently provide a photographic printing output by providing a printer control function, and additionally providing a function of performing control from scanning to photographic printing by a single operation, in an electron microscope having a frame memory and digital I/F.

CONSTITUTION: A sample 7 is irradiated with an electron beam 2 from an electron gun 1 through a focusing lens 3, defecting coil 4 and an objective lens 5, to store an image data of the sample in a frame memory 10 through a detector 8 and an A/D converter 9. Here is provided a printer control function 15b in a control part 15, and the data stored in the frame memory 10 is directly digitally transferred to a printer 18 through a digital I/F16. In this way, a photographic printing output can be efficiently obtained without deteriorating an image quality.


Inventors:
HIRASHIMA TOMOYASU
Application Number:
JP2011495A
Publication Date:
August 20, 1996
Filing Date:
February 08, 1995
Export Citation:
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Assignee:
HITACHI LTD
HITACHI SCIENCE SYSTEMS LTD
International Classes:
H01J37/22; (IPC1-7): H01J37/22
Attorney, Agent or Firm:
Ogawa Katsuo



 
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