PURPOSE: To accurately irradiate an electron beam upon an analysis point, by multiplying a horizontal scanning signal by a signal obtained by processing a vertical scanning signal in a prescribed manner, to produce a new horizontal scanning signal to use it when displaying a scanned image of a sample in order to select the analysis point.

CONSTITUTION: In the analysis mode of a scanning electron microscope, a signal from a vertical level adjustment circuit 12 is added to a signal from a vertical scanning signal generation circuit 9 by a circuit 11, the output from which is added to that from a bias power supply 15 by a circuit 14 through an absolute value circuit 13. The output from the circuit 14 and a signal from a horizontal scanning signal generation circuit 8 are multiplied together by a multiplication circuit 10, the output from which is added to a signal from a horizontal level adjustment circuit 17 by a circuit 16. The output from the circuit 16 is supplied as a horizontal scanning signal to a horizontal deflection circuit 19. The speed of the horizontal scanning signal at an analysis point is made zero. As a result, the self-inductance of the tube of the microscope and that of a deflection coil are prevented from producing an adverse effect, so that an electron beam is accurately irradiated upon the selected analysis point.