Title:
Scanning probe microscope
Document Type and Number:
Japanese Patent JP6304394
Kind Code:
B2
Abstract:
The invention provides a scanning probe microscope capable of eliminating the influence of vibration noise and obtaining, accurately and with high resolution, surface information of a sample S. A scanning probe microscope 1 includes: a main body unit 10; a control unit 30; and a wireless stand 60 that is connected to the control unit 30 through a power supply signal cable 42 and includes a power supplying coil 63 and a transmission and reception unit 64. The main body unit 10 includes: a cantilever 21 with a probe 21a; a sensor 23 for detecting displacement of the cantilever 21; an XYZ drive mechanism 25 that is controlled by the control unit 30 to move the cantilever 21 or the sample S; a vibration isolation mechanism 12; a power receiving coil 13; and a transmission and reception unit 14 for communicating with the transmission and reception unit 64.
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Inventors:
Yuichiro Ikeda
Application Number:
JP2016555026A
Publication Date:
April 04, 2018
Filing Date:
October 24, 2014
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
G01Q30/18
Domestic Patent References:
| JP2007205859A | ||||
| JP2011163999A | ||||
| JP2014512547A |
Foreign References:
| CN101251464A |
Attorney, Agent or Firm:
Yoshio Kashima
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