Title:
SCANNING-TYPE PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP3216093
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To observe a sample surface with high sensitivity without depending on an environmental temperature.
SOLUTION: In a mechanical oscillation means 6 with a cantilever 4 for scanning a surface 3 of a sample 2, the cantilever 4 is vibrated at a resonance frequency f1 and the output is given to a frequency conversion circuit 13. A signal with an intermediate frequency f3 by a local oscillation frequency f2 being stabilized by a crystal oscillator 41 is given to a phase detector 45 of a phase synchronous loop circuit 14, and a voltage-controlled oscillation circuit 46 for generating a resonance frequency f4 being stabilized by a crystal oscillator 48 is provided. Depending on force due to interaction between the cantilever 4 and the surface 3, the resonance frequency f1 changes, the intermediate frequency f3 changes corresponding to the amount of change Δf, and a voltage V1 of the phase detector 45 generates the fluctuation voltage ΔV. The distance between the cantilever 4 and the sample 2 is maintained constantly so that the amount of change Δf, namely the fluctuation voltage ΔV, becomes constant.
Inventors:
Hirofumi Yamada
Kei Kobayashi
Kei Kobayashi
Application Number:
JP20390699A
Publication Date:
October 09, 2001
Filing Date:
July 16, 1999
Export Citation:
Assignee:
Kansai TLO Co., Ltd.
International Classes:
G01B21/30; G01N37/00; G01Q30/18; H01J37/28; G01Q60/24; G01Q60/32; G01Q60/38; (IPC1-7): G01N13/16; G01B21/30; H01J37/28
Domestic Patent References:
| JP10319024A | ||||
| JP365819A | ||||
| JP10239329A |
Attorney, Agent or Firm:
Nishikyo Keiichiro (3 others)