Title:
SCANTLING MACHINING METHOD FOR QUARTZ CRYSTAL VIBRATOR
Document Type and Number:
Japanese Patent JPH07115336
Kind Code:
A
Abstract:
PURPOSE: To provide a technique to perform a large quantity of scantling of a quartz crystal vibrator with high accuracy and in a short time.
CONSTITUTION: In regard of a chemical machining technique which performs the scantling machining of a quartz crystal vibrator by the photolithographic and wet etching processes, a container 3 which contains a crystal vibrator substrate 1 and an etching solution 2 is sealed up. Then the container 3 is put into a thermostatic bath 4 or the warm water that is set at an optional temperature by a heater 5. When the inside of the container 3 is pressed by the steam pressure of the solution 2, the solution 2 is stirred by a magnetic rotor. Under such conditions, a crystal vibrator is etched.
Inventors:
TANAKA MASAKO
TAMURA TATSUTOSHI
MISAWA TAKESHI
HABA HOKI
TAMURA TATSUTOSHI
MISAWA TAKESHI
HABA HOKI
Application Number:
JP25795093A
Publication Date:
May 02, 1995
Filing Date:
October 15, 1993
Export Citation:
Assignee:
MEIDENSHA ELECTRIC MFG CO LTD
International Classes:
H03H3/02; (IPC1-7): H03H3/02
Attorney, Agent or Firm:
Fujiya Shiga (1 person outside)
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